Materials for advanced microlithography: polymers for 157 nm lithography and acid diffusion measurements
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Materials for advanced microlithography: polymers for 157 nm lithography and acid diffusion measurements
| Title: | Materials for advanced microlithography: polymers for 157 nm lithography and acid diffusion measurements |
| Author: | Tran, Hoang Vi |
| Abstract: | Not available |
| Department: |
Chemistry
Chemistry and Biochemistry |
| Subject: |
Microlithography--Materials
Polymers |
| URI: | http://hdl.handle.net/2152/1001 |
| Date: | 2002 |
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